MARC状态:审校 文献类型:西文图书 浏览次数:87
- 题名/责任者:
- Inertial MEMS : principles and practice / Volker Kempe.
- 出版发行项:
- Cambridge ; New York : Cambridge University Press, 2011.
- ISBN:
- 9780521766586 (hardback)
- ISBN:
- 0521766583 (hardback)
- 载体形态项:
- xiv, 475 p. : ill. ; 26 cm.
- 个人责任者:
- Kempe, Volker.
- 论题主题:
- BioMEMS.
- 中图法分类号:
- TN4
- 书目附注:
- Includes bibliographical references and index.
- 内容附注:
- Machine generated contents note: Preface; Acknowledgement; Notation; 1. Introduction; 2. Transducers; 3. Non-inertial forces; 4. MEMS - technologies; 5. First level packaging; 6. Electrical interfaces; 7. Accelerometers; 8. Gyroscopes; 9. Test and calibration; 10. Concluding remarks; Index.
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