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题名/责任者:

Ultrathin two-dimensional semiconductors for novel electronic applications / by Mohammad Karbalaei Akbari and Serge Zhuiykov.

版本说明:

First edition.

出版发行项:

Boca Raton, FL : CRC Press, 2020.

ISBN:

9780367275112

载体形态项:

xx, 320 pages : illustrations ; 24 cm

个人责任者:

Akbari, Mohammad Karbalaei, author.

附加个人名称:

Zhuiykov, Serge, author.

论题主题:

Semiconductor films.

论题主题:

Thin film devices.

中图法分类号:

TN304.055

书目附注:

Includes bibliographical references.

摘要附注:

"Offering perspective on scientific and engineering aspects of 2D oxide semiconductors, this book discusses how to successfully engineer 2D metal oxides for practical applications. The work provides comprehensive data about wafer-scale deposition of 2D oxide semiconductors, from scientific discussions up to the planning of experiments and reliability testing of fabricated samples. It discusses wafer-scale ALD of 2D metal oxides and investigates ALD techniques. It covers sub-nanometer surface functionalization and device fabrication and post-treatment. It addresses a range of scientific and practical applications of 2D oxide materials for electronic and optoelectronic devices"--

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