杭州电子科技大学图书馆书目检索系统

Online Public Access Catalogue

题名/责任者:

Handbook of silicon wafer cleaning technology / edited by Karen A. Reinhardt, Werner Kern.

版本说明:

2nd ed.

出版发行项:

Norwich, NY : William Andrew, c2008.

ISBN:

9780815515548

ISBN:

0815515545

载体形态项:

xxvi, 718 p. : ill. ; 24 cm.

丛编说明:

Materials science & process technology series

丛编统一题名:

Materials science and process technology series.

附加个人名称:

Reinhardt, Karen A.

附加个人名称:

Kern, Werner, 1925-

论题主题:

Silicon-on-insulator technology.

中图法分类号:

TN3

书目附注:

Includes bibliographical references and index.

豆瓣简介：