杭州电子科技大学图书馆书目检索系统

Online Public Access Catalogue

题名/责任者:

Fundamentals of microfabrication and nanotechnology / Marc J. Madou.

版本说明:

3rd ed.

出版发行项:

Boca Raton, Fla. ; London : CRC, c2012.

ISBN:

9780849331800 (set)

ISBN:

0849331803 (set)

ISBN:

9781420055115 (v. 1)

ISBN:

1420055119 (v. 1)

ISBN:

9781420055191 (v. 2)

ISBN:

1420055194 (v. 2)

ISBN:

9781420055160 (v. 3)

ISBN:

142005516X (v. 3)

载体形态项:

3 v. : ill. (some col.) ; 29 cm.

个人责任者:

Madou, Marc J.

附加个人名称:

Madou, Marc J. Fundamentals of microfabrication.

论题主题:

Microelectronics.

论题主题:

Integrated circuits-Design and construction.

论题主题:

Microelectromechanical systems-Design and construction.

论题主题:

Machining.

论题主题:

Lasers-Industrial applications.

论题主题:

Microelectronic packaging.

论题主题:

Microfabrication.

论题主题:

Nanostructured materials-Design and construction.

中图法分类号:

TN4

一般附注:

Rev. ed. of: Fundamentals of microfabrication. 2002.

书目附注:

Includes bibliographical references and indexes.

内容附注:

V. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications.

摘要附注:

"Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors".

摘要附注:

"In Solid State Physics, Fluidics and Analytical Techniques in Micro- and Nanotechnology we lay the foundations for a qualitative and quantitative theoretical understanding of micro-and nano-electromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS and NEMS, silicon (Si) is still the substrate and construction material of choice".

豆瓣简介：