机读格式显示(MARC)

• 000 00561nam2 2200181 4500

• 001 0000244275

• 020 __ |a 0-944904-31-9 |c ￥56.00

• 041 0_ |a eng

• 093 __ |a TN04-53 |v 4

• 245 1_ |a Materials and Processes for Microelectronic Systems |c Symposium on Materials and Processes for Microelectronic Systems |g |A MATERIAL |F SYMPOSIU

• 250 __ |a

• 260 __ |a Westerville |b ACS |c c1990

• 300 __ |a 733c22cm

• 440 0_ |a

• 700 _0 |a Symposium on Materials and Processes for Microelectronic Systems |A SYMPOSIU |4 著

• 851 _0 |a CN |b HIEL

• 905 __ |a HIEL |d TN04-53/S1

• 999 __ |b 1