机读格式显示(MARC)

• 000 02833cam a2200481 a 4500

• 001 0000424886

• 003 OCoLC

• 005 20120920101300.0

• 008 081001s2012 flua b 001 0 eng d

• 020 __ |a 9780849331800 (set)

• 020 __ |a 0849331803 (set)

• 020 __ |a 9781420055115 (v. 1)

• 020 __ |a 1420055119 (v. 1)

• 020 __ |a 9781420055191 (v. 2)

• 020 __ |a 1420055194 (v. 2)

• 020 __ |a 9781420055160 (v. 3)

• 020 __ |a 142005516X (v. 3)

• 035 __ |a (OCoLC)751701536

• 040 __ |a UKMGB |b eng |c UKMGB |d PAU |d UTO

• 050 14 |a TK7875 |b .M33 2012

• 082 04 |a 621.38152 |2 23

• 090 __ |a TN4/BM3

• 093 __ |a TN4 |2 4

• 100 1_ |a Madou, Marc J.

• 245 10 |a Fundamentals of microfabrication and nanotechnology / |c Marc J. Madou.

• 250 __ |a 3rd ed.

• 260 __ |a Boca Raton, Fla. ; |a London : |b CRC, |c c2012.

• 300 __ |a 3 v. : |b ill. (some col.) ; |c 29 cm.

• 500 __ |a Rev. ed. of: Fundamentals of microfabrication. 2002.

• 504 __ |a Includes bibliographical references and indexes.

• 505 0_ |a V. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications.

• 520 __ |a "Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors".

• 520 __ |a "In Solid State Physics, Fluidics and Analytical Techniques in Micro- and Nanotechnology we lay the foundations for a qualitative and quantitative theoretical understanding of micro-and nano-electromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS and NEMS, silicon (Si) is still the substrate and construction material of choice".

• 650 _0 |a Microelectronics.

• 650 _0 |a Integrated circuits |x Design and construction.

• 650 _0 |a Microelectromechanical systems |x Design and construction.

• 650 _0 |a Machining.

• 650 _0 |a Lasers |x Industrial applications.

• 650 _0 |a Microelectronic packaging.

• 650 _0 |a Microfabrication.

• 650 _0 |a Nanostructured materials |x Design and construction.

• 700 1_ |a Madou, Marc J. |t Fundamentals of microfabrication.

• 920 __ |a 233030 |z 2