机读格式显示(MARC)
- 000 00514nam2 2200181 4500
- 245 1_ |a Proceedings |c IEEE/SEMI International Semicondutor Manufaturing Seience Sympolium |g |A PROCEEDI |F IEEESEMI
- 260 __ |a New York |b IEEE |c c1989
- 700 _0 |a IEEE/SEMI International Semicondutor Manufaturing Seience Sympolium |A IEEESEMI |4 著
- 905 __ |a HIEL |d TN305-53/I1