机读格式显示(MARC)
- 000 01128cam a2200349 a 4500
- 008 070730s2009 gw a b 001 0 eng d
- 020 __ |a 9783540745587 (cased)
- 020 __ |a 9783540745594 (ebk.)
- 040 __ |a AU@ |c AU@ |d BWX |d YDXCP |d CtY
- 050 _4 |a TK7871.85 |b .I5847 2009
- 082 04 |a 621.38152 |2 22
- 099 __ |a CAL 022009026179
- 245 00 |a Into the nano era : |b Moore's law beyond planar silicon CMOS / |c Howard R. Huff, Editor.
- 260 __ |a Berlin : |b Springer, |c c2009.
- 300 __ |a xxviii, 343 p. : |b ill. ; |c 24 cm.
- 490 1_ |a Springer series in materials science, |x 0933-033X ; |v 106
- 504 __ |a Includes bibliographical references and index.
- 650 _0 |a Integrated circuits |x History.
- 650 _0 |a Silicon |x Electric properties.
- 650 _0 |a Semiconductors |x Materials.
- 650 _0 |a Nanotechnology.
- 650 _0 |a Nanotechnology |x Forecasting.
- 700 1_ |a Huff, Howard R.
- 830 _0 |a Springer series in materials science ; |v 106.