机读格式显示(MARC)
- 000 00458nam2 2200181 4500
- 245 1_ |a Glew Discharge Processes;Sputtering and Plasma Etching. |c Chapman,Brian. |g |A GLEWDISC,SPUTTERI |F CHAPMAN,BRIAN
- 260 __ |a N.Y. |b Wiley |c 1980
- 700 _0 |a Chapman,Brian. |A CHAPMAN,BRIAN |4 著
- 905 __ |a HIEL |d O461.2/C1