机读格式显示(MARC)

• 000 01361cam a2200397 i 4500

• 001 0000580870

• 003 OCoLC

• 005 20160118140700.0

• 008 150504s2015 gw a b 001 0 eng d

• 020 __ |a 9783527335459 (hardback) : |c CNY1303.74

• 020 __ |z 9783527676361 (ePDF)

• 020 __ |z 9783527676354 (ePub)

• 020 __ |z 9783527676347 (Mobi)

• 020 __ |z 9783527676330 (oBook)

• 040 __ |c HDU

• 082 04 |a 621.381 |2 23

• 090 __ |a TP273/BB15

• 093 __ |a TP273 |2 5

• 245 00 |a Resonant MEMS : |b fundamentals, implementation and application / |c edited by Oliver Brand, Isabelle Dufour, Stephen M. Heinrich and Fabien Josse.

• 260 __ |a Wiesbaden : |b Wiley-VCH Verlag & Co. KGaA, |c [2015]

• 300 __ |a 512 pages : |b illustrations ; |c 26 cm.

• 336 __ |a text |2 rdacontent

• 337 __ |a unmediated |2 rdamedia

• 338 __ |a volume |2 rdacarrier

• 490 1_ |a Advanced micro and nanosystems

• 504 __ |a Includes bibliographical references and index.

• 650 _0 |a Microelectromechanical systems |x Design and construction.

• 650 _0 |a Microfabrication.

• 650 _0 |a Resonance.

• 700 1_ |a Brand, Oliver, |e editor.

• 700 1_ |a Dufour, Isabelle, |e editor.

• 700 1_ |a Heinrich, Stephen M., |e editor.

• 700 1_ |a Josse, Fabien, |e editor.

• 730 0_ |a Wiley online library.

• 830 _0 |a Advanced micro & nanosystems.

• 920 __ |a 233030 |z 1