机读格式显示(MARC)
- 000 00465nam2 2200181 4500
- 245 1_ |a Proceedings |c Symposium on Plasma Processing |g |A PROCEEDI |F SYMPOSIU
- 260 __ |a Pennington, N. J. |b Electrochemical Society , Inc. |c 1982
- 700 _0 |a Symposium on Plasma Processing |A SYMPOSIU |4 著
- 905 __ |a HIEL |d TN05/S2