机读格式显示(MARC)

• 000 00520nam2 2200181 4500

• 001 0000243360

• 020 __ |a |c ￥2.90

• 041 0_ |a eng

• 093 __ |a TS828 |v 4

• 245 1_ |a Developments in Semiconductor Microlithography iv , |c The Society of Photo-Optical Instrumentation Engineers |g |A DEVELOPM, |F THESOCIE

• 250 __ |a

• 260 __ |a Belligham |b SPIE , |c 1979

• 300 __ |a 194c

• 440 0_ |a

• 700 _0 |a The Society of Photo-Optical Instrumentation Engineers |A THESOCIE |4 著

• 851 _0 |a CN |b HIEL

• 905 __ |a HIEL |d TS828/S1

• 999 __ |b 1