机读格式显示(MARC)

• 000 00972cam a2200301 a 4500

• 001 0000552886

• 003 CAL

• 005 20150309173000.0

• 008 130513s2013 gw a b 001 0 eng

• 010 __ |a 2012554253

• 020 __ |a 9783527319039 : |c CNY1375.00

• 040 __ |a DLC |c DLC |d DLC |d SCT

• 050 00 |a TK7875 |b .S978 2013

• 082 00 |a 621.381 |2 23

• 090 __ |a TM38/BB1

• 093 __ |a TM38 |2 5

• 245 00 |a System-level modeling of MEMS / |c edited by Tamara Bechtold, Gabriele Schrag, and Lihong Feng.

• 260 __ |a Weinheim : |b Wiley-VCH, |c c2013.

• 300 __ |a xxxii, 530 p. : |b ill. ; |c 25 cm.

• 490 1_ |a Advanced micro & nanosystems

• 504 __ |a Includes bibliographical references and index.

• 650 _0 |a Microelectromechanical systems.

• 650 _0 |a Microelectromechanical systems |x Mathematical models.

• 700 1_ |a Bechtold, T. |q (Tamara)

• 700 1_ |a Schrag, Gabriele.

• 700 1_ |a Feng, Lihong.

• 830 _0 |a Advanced micro & nanosystems.

• 920 __ |a 233030 |z 1