机读格式显示(MARC)

• 000 00923cam a2200301Ia 4500

• 001 0000301954

• 003 __OCoLC

• 005 20080530103600.0

• 008 080521r20041998enka b 001 0 eng d

• 020 __ |a 0521607671

• 040 __ |a TEF |c TEF |d OCL |d BAKER

• 050 _4 |a TK7871.15.S55 |b E49 2004

• 082 04 |a 621.3815 |2 21

• 090 __ |a TN4/BE2

• 093 __ |a TN4 |2 4

• 100 1_ |a Elwenspoek, M. |q (Miko), |d 1948-

• 245 10 |a Silicon micromachining / |c M. Elwenspoek and H.V. Jansen.

• 250 __ |a 1st pbk. ed

• 260 __ |a Cambridge, U.K. ; |a New York : |b Cambridge University Press,

• 300 __ |a xiii, 405 p. : |b ill. ; |c 25 cm

• 440 _0 |a Cambridge studies in semiconductor physics and

• 500 __ |a "First published 1998"--T.p. verso

• 504 __ |a Includes bibliographical references and index

• 650 _0 |a Silicon

• 650 _0 |a Micromachining

• 650 _0 |a Etching

• 700 1_ |a Jansen, H. V. |q (Henri V.)

• 920 __ |a 233030 |z 2