机读格式显示(MARC)
- 000 01110cam a2200301 a 4500
- 008 071207s2008 enka b 001 0 eng
- 020 __ |a 9780470058619 (cloth)
- 040 __ |a DLC |c DLC |d UKM |d BTCTA |d BAKER |d YDXCP |d BWKUK |d BWX |d CVU
- 050 _0 |a TK7875 |b .G4613 2008
- 100 1_ |a Gerlach, Gerald.
- 240 10 |a Einf鑥hrung in die Mikrosystemtechnik. |l English.
- 245 10 |a Introduction to microsystem technology : |b a guide for students / |c Gerald Gerlach, Wolfram D鑟tzel ; translated by D鑟rte M鑥ller.
- 260 __ |a Chichester, England ; |a Hoboken, NJ : |b J. Wiley & Sons, |c c2008.
- 300 __ |a xxiii, 351 p. : |b ill. ; |c 26 cm.
- 440 _4 |a The Wiley microsystem and nanotechnology series.
- 504 __ |a Includes bibliographical references and index.
- 546 __ |a Translated from the German.
- 650 _0 |a Microelectromechanical systems |x Design and construction.
- 650 _0 |a Microelectronics.
- 700 1_ |a D鑟tzel, Wolfram.