机读格式显示(MARC)
- 000 00517nam2 2200181 4500
- 020 __ |a 3-540-12593-0 |c ¥3.70
- 245 1_ |a Sputtering by particle bonbardment 2;Supttering of alloys and compoynds,electron and neutron sputtering,surface topography |c |g |A SPUTTERI,SUPTTERI,ELECTRON,SUR |F
- 260 __ |a Berlin |b Springer-Verlag |c 1983
- 905 __ |a HIEL |d O572.2/S1