机读格式显示(MARC)

• 000 01023cam a2200313 a 4500

• 001 0000374713

• 005 20100930105400.0

• 008 070907s2008 nyua b 001 0 eng

• 010 __ |a 2007037151

• 020 __ |a 9780815515548

• 020 __ |a 0815515545

• 035 __ |a (OCoLC)ocn170955262

• 035 __ |a (OCoLC)170955262

• 040 __ |a DLC |c DLC |d YDXCP |d BAKER |d C#P |d DLC

• 050 00 |a TK7871.85 |b .H338 2008

• 082 00 |a 621.3815/2 |2 22

• 090 __ |a TN3/BR1

• 093 __ |a TN3 |2 4

• 245 00 |a Handbook of silicon wafer cleaning technology / |c edited by Karen A. Reinhardt, Werner Kern.

• 250 __ |a 2nd ed.

• 260 __ |a Norwich, NY : |b William Andrew, |c c2008.

• 300 __ |a xxvi, 718 p. : |b ill. ; |c 24 cm.

• 490 1_ |a Materials science & process technology series

• 504 __ |a Includes bibliographical references and index.

• 650 _0 |a Silicon-on-insulator technology.

• 700 1_ |a Reinhardt, Karen A.

• 700 1_ |a Kern, Werner, |d 1925-

• 830 _0 |a Materials science and process technology series.

• 920 __ |a 233030 |z 2