机读格式显示(MARC)
- 000 00911nam2 2200265 4500
- 008 060525s2005 gw a b 001 0 eng
- 020 __ |a 3-527-31080-0(cloth) |c RMB2395.00
- 245 00 |a CMOS-MEMS / |c volume editors: O. Brand and G.K. Fedder.
- 260 __ |a Weinheim ; |a [Great Britain] : |b Wiley-VCH, |c c2005.
- 300 __ |a xiv, 594 p. : |b ill. ; |c 25 cm.
- 440 0_ |a Advanced micro & nanosystems ; |v v. 2.
- 504 __ |a Includes bibliographical references and index.
- 650 _0 |a Microelectromechanical systems.
- 650 _0 |a Metal oxide semiconductors, Complementary.
- 700 1_ |a Brand, Oliver, |A Brand, Oliver |d 1964-.
- 700 1_ |a Fedder, G. K. |A Fedder, G. K |q (Gary K.).
- 810 99060525s2006 enka b o10100 eng d |c 20060525
- 905 __ |a HIEL |d TN432/B2
- 999 __ |a 22 |b 1 |e 200601