机读格式显示(MARC)

• 000 00885nam2 2200265 4500

• 001 0000228837

• 005 20050323084241.0

• 008 050323s2004 enka b 001 0 eng

• 020 __ |a 0-470-85106-6(paper) |c CNY537.90

• 040 __ |a BUPTL

• 041 0_ |a eng

• 093 __ |a TN4 |v 4

• 100 1_ |a Franssila, Sami.

• 245 10 |a Introduction to microfabrication / |c Sami Franssila.

• 260 __ |a Chichester, West Sussex, England ; |a Hoboken, NJ : |b J.Wiley, |c c2004.

• 300 __ |a xvii, 401 p. : |b ill. ; |c 26 cm

• 500 __ |a commened by Huibin Qin. |A commened by Huibin Qin

• 504 __ |a Includes bibliographical references and index.

• 650 _0 |a Microelectromechanical systems.

• 650 _0 |a Microfabrication.

• 650 _0 |a Electronic apparatus and appliances.

• 810 99050323s2005 enka b o10100 eng d |c 20050323

• 851 _0 |a CN |b HIEL

• 905 __ |a HIEL |d TN4/F1*1

• 999 __ |a 22 |b 1 |e 2005003