机读格式显示(MARC)

• 000 00484nam2 2200181 4500

• 001 0000230095

• 020 __ |a 0-8194-2657-1 |c ￥674.82

• 041 0_ |a eng

• 093 __ |a TG519.1 |v 4

• 245 1_ |a Microlithography and Metrology in Micromachining 3 |c Friedrich, Craig R. |g |A MICANMI |F FRIEDRICH, C

• 250 __ |a

• 260 __ |a Wash. D. C. |b SPIE |c 1997.

• 300 __ |a VII, 134c27cm

• 440 0_ |a

• 700 _0 |a Friedrich, Craig R. |A FRIEDRICH, C |4 著

• 851 _0 |a CN |b HIEL

• 905 __ |a HIEL |d TG519.1/F1

• 999 __ |b 1