机读格式显示(MARC)

• 000 01040cam a2200289 a 4500

• 001 0000493335

• 003 OCoLC

• 005 20131010103700.0

• 008 110818s2012 ne a b 001 0 eng d

• 010 __ |a 2011276747

• 020 __ |a 9781437778175 (hbk.)

• 020 __ |a 1437778178 (hbk.)

• 040 __ |a UKMGB |b eng |c UKMGB |d YDXCP |d BWX |d CUI |d CUV |d DLC |d MIA |d CDX |d CIN

• 082 04 |a 621.3815 |2 23

• 090 __ |a TH-39/BD1

• 093 __ |a TH-39 |2 5

• 100 1_ |a Dorey, Robert A.

• 245 10 |a Ceramic thick films for MEMS and microdevices / |c Robert A. Dorey.

• 260 __ |a Amsterdam ; |a Boston, MA : |b William Andrew ; |a Oxford : |b Elsevier Science [distributor], |c c2012.

• 300 __ |a xviii, 191 p. : |b ill. ; |c 24 cm.

• 490 1_ |a Micro & nano technologies series.

• 504 __ |a Includes bibliographical references (p. 183-185) and index.

• 650 _0 |a Thick-film circuits |x Design and construction.

• 650 _0 |a Microelectromechanical systems |x Design and construction.

• 650 _0 |a Nanoelectronics.

• 830 _0 |a Micro & nano technologies.

• 920 __ |a 233030 |z 2