机读格式显示(MARC)
- 000 00843cam a2200241 a 4500
- 008 150319s2015 enka b 001 0 eng d
- 040 __ |a BTCTA |b eng |c BTCTA |d YDXCP |d OCLCO |d LTSCA |d OCLCF |d CPV
- 100 1_ |a Bhattacharyya, Bijoy.
- 245 10 |a Electrochemical micromachining for nanofabrication, MEMS and nanotechnology / |c Bijoy Bhattacharyya.
- 260 __ |a Oxford, UK : |b William Andrew, an imprint of Elsevier, |c c2015.
- 300 __ |a xxv, 270 p. : |b ill. ; |c 25 cm.
- 490 1_ |a Micro & nano technologies
- 504 __ |a Includes bibliographical references and index.
- 650 _0 |a Micromachining.
- 650 _0 |a Nanotechnology.
- 650 _0 |a Microelectromechanical systems.
- 830 _0 |a Micro & nano technologies.