机读格式显示(MARC)
- 000 00466nam2 2200181 4500
- 245 1_ |a Silicon nitride thin insulating films |c Vikram J .Kagoor |g |A SILICONN |F VIKRAMJK
- 260 __ |a Pennington , N . J |b Electrochemical Society ,Inc |c 1983
- 700 _0 |a Vikram J .Kagoor |A VIKRAMJK |4 著
- 905 __ |a HIEL |d TM215/3/S1