杭州电子科技大学图书馆书目检索系统

Online Public Access Catalogue

题名/责任者:

Resonant MEMS : fundamentals, implementation and application / edited by Oliver Brand, Isabelle Dufour, Stephen M. Heinrich and Fabien Josse.

出版发行项:

Wiesbaden : Wiley-VCH Verlag & Co. KGaA, [2015]

ISBN:

9783527335459 (hardback) :

载体形态项:

512 pages : illustrations ; 26 cm.

附加统一题名:

Wiley online library.

丛编说明:

Advanced micro and nanosystems

丛编统一题名:

Advanced micro & nanosystems.

附加个人名称:

Brand, Oliver, editor.

附加个人名称:

Dufour, Isabelle, editor.

附加个人名称:

Heinrich, Stephen M., editor.

附加个人名称:

Josse, Fabien, editor.

论题主题:

Microelectromechanical systems-Design and construction.

论题主题:

Microfabrication.

论题主题:

Resonance.

中图法分类号:

TP273

书目附注:

Includes bibliographical references and index.

豆瓣简介：